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High Coupling Piezoelectric Thick Film Materials

Dr Tomasz Zawada, Other Manager
Ferroperm Piezoceramics A/S, MEGGITT, Denmark
Denmark
 
 
This presentation was given at Energy Harvesting & Storage Europe 2010 on May 27, 2010.
 

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Presentation Summary

  • Introduction to InSensor® PZT (Lead Zirconate Titanate) thick film technology, including deposition and patterning techniques, available substrates and potential applications.
  • Experimental setup, test structures of unimorphs fabricated using MEMS technology in combination with PZT thick films. Results of the measurements carried out using shaker system and reference accelerometer.
  • Conclusions and summary, including prospects of manufacturing energy harvesting modules comprising sensors(e.g.accelerometers) or/and actuators leading to fully integrated energy autonomous devices when combined with wireless communication.

Speaker Biography (Tomasz Zawada)

Dr. Tomasz Zawada, holds a Ph.D. degree in microelectronic engineering. He has more than 10 years of experience in academic and industrial research in the field of ceramic microsystems, microfluidics and piezoelectric materials and devices. Currently he is with MEGGITT - Ferroperm Piezoceramics (Denmark). His main research interest is focused on applications of piezoelectric thick films in microelectronics. He works as a project manager coordinating commercial as well as scientific research projects funded both on National and European level.

Company Profile (Ferroperm Piezoceramics A/S, MEGGITT)

Meggitt PLC is a global engineering group specialising in extreme environment components and smart sub-systems for aerospace, defence and energy markets. More than 7500 people are employed across manufacturing facilities in Asia, Europe and North America and regional bases in India and the Middle East. Denmark based Meggitt Ferroperm Piezoceramics is a member of Meggitt Sensing Systems and has more than 50 years of experience in manufacturing of high quality piezoelectric ceramics for its strategic markets: Vibration Sensors, Underwater Acoustics, Medical Ultrasound, Flowmeters, NDT and Energy Harvesting. Ferroperm is the first company to commercialize piezoelectric thick films technology through its registered trademark - InSensor®.