Spotlight on ULVAC | IDTechEx Research Article

Spotlight on ULVAC | IDTechEx Research Article

ULVAC, Inc. is a global leader with a comprehensive portfolio of vacuum technologies. ULVAC has been continuously developing manufacturing solutions in applications of thin film battery, power device, non-volatile memory, and PZT piezoelectric MEMS sensor which are all key elements for the IoT world. They will be exhibiting at the IDTechEx Show!

Spotlight on ULVAC
ULVAC Technologies, Inc. is an international corporation that design and manufactures systems for industrial and research applications utilizing vacuum technology. Our products cover a broad spectrum of markets, including: equipment for the semiconductor, MEMS, solar, flat panel display, automotive, medical, electronics, and refrigeration industries. ULVAC Technologies uses a class-10 process development laboratory and customer demonstration facility to meet the unique needs of their different markets. ULVAC Technologies is a subsidiary of ULVAC, Inc., which is made up of over 45 companies engaged in most sectors of the vacuum industry.
 
The company is ISO 9001 and 14001 certified.
Products
NLD-570EXa for Deep Oxide Etching
  • Stable process and excellent repeatability
  • High selectivity
  • Smooth side walls
  • Made in USA
NE-550EXa Magnetically Enhanced ICP Plasma Etcher
  • Optimized process for LED, RF Device, SiC, Noble Metal, III-V Materials, and Ferro-Electric Materials
  • ULVAC patented STAR electrode prevents re-deposition
  • Made in USA
ENVIRO-1Xa for MEMS Release and Difficult Strip Applications
  • Dry plasma, low temperature, polymeric sacrificial layer removal system
  • Removes thick and difficult photoresists
  • Made in USA
CS-200 Load-Lock Sputtering System for R&D and Low Production Volumes
  • Substrate transfer capability up to 300mm (deposition performance up to 200mm)
  • Automatic multi-layered deposition by recipe control
  • Made in USA
401 Griffin Brook Drive, Methuen, MA 01844
www.ulvac.com
978-686-7550
All Image Sources: ULVAC Technologies