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A Flexible Piezoelectret Actuator/Sensor Patch For Mechanical Human-Machine Interface
Santa Clara Convention Center, CA, USA
Grand Ballroom F
15:00 - 15:20
Flexible and wearable devices with the capabilities of both detecting and generating mechanical stimulations are critical for applications in human-machine interfaces, such as augmented reality (AR) and virtual reality (VR). Herein, a flexible patch based on a sandwiched piezoelectret structure is demonstrated to have a high equivalent piezoelectric coefficient of d33 at 4050 pC/N to selectively perform either the actuating or sensing function. As an actuator, mechanical vibrations with a peak output force of more than 20 mN have been produced, similar to those from the vibration mode of a modern cell phone, and can be easily sensed by human skin. As a sensor, both the pressure detection limit of 1.84 Pa for sensing resolution and excellent stability of less than 1% variations in 6000 cycles have been achieved. The design principle together with the sensing and driving characteristics can be further developed and extended to other soft matters and flexible devices.
Liwei Lin is a professor in the Department of Mechanical Engineering, the James Marshall Wells Academic Chair, and a Co-Director of the Berkeley Sensor & Actuator Center.
Professor Lin's research interests include design, modeling, and fabrication of micro/nano structures, sensors, actuators, and mechanical issues in micro/nano systems which includes heat transfer, solid/fluid mechanics, and dynamics.
Professor Lin is the recipient of the 1998 NSF CAREER Award for research in MEMS Packaging and the 1999 ASME Journal of Heat Transfer best paper award for his work on micro scale bubble formation. He led the effort to establish the MEMS division in ASME
and served as the founding Chairman of the Executive Committee from 2004-2005. He is an ASME Fellow and has 20 issued US patents in the area of MEMS. He was the general co-chair of the 24th international conference on Micro Electro Mechanical Systems at
Cancun, Mexico. Currently, he serves as a subject editor for the IEEE/ ASME Journal of Microelectromechanical Systems and the North and South America Editor of Sensors and Actuators - A Physical.
Professor Lin received his Ph.D. degree from the University of California, Berkeley in 1993.
Smart phones, cars, and wearable activity trackers are just a few examples of products with sensors based on technologies pioneered at the Berkeley Sensor & Actuator Center, a Graduated NSF Industry/University Cooperative Research Center for Micro/Nanoelectromechanical Sensors & Systems (MEMS/NEMS). New research at BSAC will have even greater impacts on consumer, industrial, and medical products.