Roll-to-Roll Sputter Deposition on Ultra-Thin Flexible Glass Substrate (Printed Electronics USA 2014)

Ultra-thin flexible glass, which is flexible enough to be wound in a roll, is very attractive for high-throughput roll-to-roll(R2R) processing of flexible devices, because of its thermal stability and excellent barrier.

This presentation will give an overview of flexible glass and our results of successful R2R sputter deposition on a flexible glass roll.

Hiroshi Tamagaki joined Kobe Steel, Ltd. in 1984 after receiving Master's degree in Electrical Engineering from Kyoto University. Since 1986, he has been working on vapor deposition technologies, including arc evaporation, sputtering and PECVD process.

He is now active as a manager of R&D group at Development Center of Machinery Business, and his R&D activity includes R2R functional coatings on flexible materials as well as hard coatings on components. His work on transparent barrier coating by R2R PECVD system received Best Paper Award at International Display Workshops 2010.

Kobe Steel, Ltd., founded in 1905, is one of Japan's leading steelmakers, and the business includes not only steel business but also aluminum and copper products, wholesale power supply, machinery, construction machinery and other businesses. Machinery Business of Kobe Steel offers a broad product range, including industrial machinery, compressors, etc. Roll-to-roll PVD/CVD equipment is one of the advanced products of Machinery Business.

Further information can be found at http://www.kobelco.co.jp/english/index.html