Scaling Graphene Growth Over 300mm Wafers (Graphene LIVE! USA 2012)

Dr Ken Teo, Director of Nanoinstruments
Aixtron SE
United Kingdom
Déc 05, 2012.


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Presentation Summary

1) Graphene film growth technology and results
2) Graphene flim integration schemes
3) Scaling and reactor development at AIXTRON

Speaker Biography (Ken Teo)

Dr. Ken Teo is the Director of Nanoinstruments at AIXTRON. He holds a BE (Elec) from the University of Canterbury, MBA and PhD from the University of Cambridge. In 2005, Dr. Teo founded and ran Nanoinstruments Ltd (UK) which manufactures innovative Graphene and Carbon Nanotube growth equipment for research and industry; in 2007, Nanoinstruments was acquired by AIXTRON where Dr Teo is presently responsible for driving the Graphene and Carbon Nanotube business and technology. His previous roles include Lecturer in Electrical Engineering at University of Cambridge, Fellow/Director of Studies at Christ's College Cambridge, Royal Academy of Engineering Research Fellow, Fellow of the Institute of Nanotechnology, Project Engineer at Defence Material Organisation (Singapore) and Product Engineer at PDL Holdings (NZ). Dr Teo has extensive experience in the area of carbon nanomaterials and is the author/co-author of 150 papers and 4 patents in this area.

Company Profile (AIXTRON)

AIXTRON is a leading supplier of deposition equipment to the semiconductor industry. The Company's technology solutions are used by customers worldwide, enabling them to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials, for polymers, carbon nanotubes, graphene, and other nanomaterials. Core technologies: - Organic Vapor Phase Deposition (OVPD®) enables the deposition of organic small molecules for OLEDs and organic semiconductors. - Polymer Vapor Phase Deposition (PVPD®) provides a solution for carrier gas enhanced vapor phase deposition of functional polymer thin films. - OptaCap PECVD Deposition of highly flexible barrier films.
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