High Speed Low Cost ALD Ultra Barrier on Sheets and Rolls (Printed Electronics USA 2014)

Mr Eric Dickey, President
Lotus Applied Technology LLC
United States
 
2014 11월20일.

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Santa Clara 2014 Presentation - Lotus Applied Technology LLC*

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Presentation Summary

• Atomic Layer Deposition (ALD) has been shown by many organizations to provide extremely high quality diffusion barriers, even for very thin single layers.
 
• New techniques based on "Spatial" ALD have been developed which allow extremely high deposition speeds for batch processing on sheets and for full roll to roll production, with batch deposition times of a few minutes and roll to roll web speeds exceeding one meter per second.
 
• Combined with the use of low-cost precursors and the minimal barrier film thickness required, the cost of the ultra-barrier coating is substantially reduced, enabling its use in highly price-sensitive applications.

Speaker Biography (Eric Dickey)

Eric Dickey is President of Lotus Applied Technology, a company specializing in thin film process research and development, with a particular emphasis on Atomic Layer Deposition (ALD). Eric began his career in 1984, holding a variety of engineering and management positions in R&D and manufacturing organizations at companies in the flat panel display and optical coating industries. He has extensive experience in the technical fields of reactive sputtering, evaporation, and CVD processing, and over 20 years of experience in ALD technology, including processes for dielectrics, conductors, inorganic phosphors, optical coatings, and diffusion barriers. He is currently focused on "Spatial" ALD, for high speed deposition of ALD films.

Company Profile (Lotus)

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Lotus Applied Technology is a technology development and licensing company, working to break down the cost and throughput limitations of conventional pulse-based Atomic Layer Deposition (ALD). Lotus was spun off in 2007 from Planar Systems, Inc., where ALD was used in high volume manufacturing and R&D for more than 20 years. Currently, the company is focused on ultra-barrier encapsulation processes for rigid and flexible substrates. Lotus works directly with global manufacturing partners in the supply chain for direct encapsulation and Roll-to-Roll converting of encapsulation materials, for the Thin Film PV, OLED display, OLED lighting, and high performance packaging industries.
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