Roll-to-roll Atomic Layer Deposition Technology (Printed Electronics Europe 2013)

Dr Mikko Soderlund, Director, Technical Sales
2013 4월18일.


Beneq - presentation*

If you already have access, please [Login]

Presentation Summary

  • ALD is conformal and pinhole-free thin-film coating technology
  • ALD is ideally suited for demanding encapsulation applications, e.g. OLED and flexible PV
  • spatial ALD is enabling the technology leap from rigid to flexible substrates
  • R2R ALD system was scaled up successfully to 500 mm wide web & industrial scale capasity

Speaker Biography (Mikko Söderlund)

Mikko Söderlund has PhD degree from Helsinki University of Technology (2009). Mikko has worked in the photonics R&D and industry for more than 10 years. In 2010, he joined Beneq to lead the application development in ALD-based thin-film encapsulation of OLEDs.

Company Profile (Beneq)

Beneq logo
Beneq - Equipment, Technology and Applications
Beneq is a supplier of production and research equipment for thin film coatings. We serve the cleantech and renewable energy fields and are at the forefront of applications development in solar power technology, energy conservation and flexible electronics. Our equipment is based on two technologies, atomic layer deposition (ALD) and aerosol coating. Beneq also offers complete coating services to its customers.
Industries served include:
  • printed electronics (diffusion and moisture barriers)
  • photovoltaics (TCO, barrier and anti-reflective coatings, surface passivation)
Equipment range includes:
  • TFS 600 Thin Film System for ALD, for OLED encapsulation
  • TFS 200R Thin Film System for ALD, for continuous ALD and roll-to-roll research
  • WCS 500 Web Coating System for roll-to-roll ALD
View Beneq Timeline