Manufacturing Technology Of All-Solid-State Thin-Film Lithium Secondary Battery For IoT Applications (Energy Harvesting Europe 2017)

All-solid-state thin-film lithium secondary battery has come to be recognized as key

enabling technologies for stand-alone MEMS devices which are essential for IoT.

A detailed explanation will be given on the vacuum technologies for the manufacturing of

thin-film lithium secondary battery, we have successfully established reliable process

technologies for it.

Mr. Akiyoshi Suzuki received M.S. degree in Engineering from Shizuoka University, Japan in 2007 and then belonged to Institute of Semiconductor and Electronics Technologies in ULVAC, Inc.

He has been developed on manufacturing technology of all-solid-state thin-film secondary battery based on vacuum technology such as sputtering, evaporation and polymerization techniques since 2010.

ULVAC, Inc. (Headquarter located in Chigasaki, Kanagawa, Japan) is a global leader with the most comprehensive portfolio of vacuum technologies in the world. ULVAC has been continuously developing manufacturing solutions in applications of thin film battery, power device, non-volatile memory, and PZT piezoelectric MEMS sensor which are all key elements for the IoT world.