Nano-Powerplant For On-Chip Autonomous Systems

Dr Wenke Weinreich, Scientist
Fraunhofer IPMS
Germany
 

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Europe 2017 Presentation - Fraunhofer IPMS*

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プレゼンテーション概要

Future miniaturized autonomous sensor systems rely on a stable and continuous energy supply. Furthermore, it should be small sized and in the last expansion stage producible together with the powermangement ASIC, the communication interface, the sensor and the storage memory. The major parts of such a Nano-Powerplant are energy harvesting devices, capacitors and batteries. In this talk, we present unique solutions for on-chip thin film devices with high energy collection rate and storage capability. Our focus lies on CMOS compatible materials, processes and structures to produce piezoelectric and thermoelectric harvesters, high-density MIM capacitors and All-Solid State Li-Ion Batteries.

講演者の経歴 (Wenke Weinreich)

Dr. Wenke Weinreich is leading the group High-K Devices at the Center Nanoelectronic Technologies (CNT), as of 2013 a business unit of the Fraunhofer IPMS. Dr. Weinreich received the diploma degree from Technical University Freiberg, Germany, in 2005 and joined Fraunhofer CNT one year later where she started research on high-k dielectrics for DRAM capacitors. In 2013 she received her Ph.D. from Friedrich-Alexander-Universität Erlangen-Nürnberg. Dr. Weinreich published more than 30 journal articles and conference contributions. Her main research interests are atomic layer deposited materials for embedded memories, capacitors, batteries and energy harvesting devices.

会社紹介 (Fraunhofer IPMS)

Fraunhofer IPMS logo
The Fraunhofer IPMS and its Center Nanoelectronic Technologies (CNT) develops semiconductor technologies on 300 mm wafers and integrates innovative functionalities into existing CMOS platforms. The most prominent fields of research are emerging non-volatile memories with special focus on devices with ferroelectric CMOS-compatible materials and miniaturized power management systems employing batteries, harvesters and highly capacitive elements for energy storage to enable self-powered microsystems.
For leading edge research, the CNT uses a broad and flexible tool and process platform. The Screening Fab concept invites consumable suppliers, tool vendors and semiconductor manufacturers to evaluate new materials and fabrication processes. The service portfolio covers qualification of manufacturing steps such as cleaning and etching, copper plating and CMP or the evaluation of new precursors for atomic layer deposition. In addition, CNT offers a broad spectrum of techniques for physical failure analysis and semiconductor device characterization.
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