Insights By Characterization Of Large Area Graphene Along The Process Chain (Graphene Europe 2017)

Large area graphene mappings are applied for process optimization and for efficient quality control. The presented eddy current testing method utilizes local conductivity variations for the characterization after transfer, doping, annealing and stacking processes. This testing method is convincing due to its contactless and non-destructive measuring solution.

Dipl.-Wi.-Ing. Marcus Klein is managing director of the SURAGUS GmbH. He got his master degree in Business and Engineering from University of Technology Dresden focusing on microelectronics and electronic packaging. Past working experiences include Siemens Pte Singapore, Wacker Chemie, Advanced Mask Technology Center and Fraunhofer Institute for non-destructive testing Dresden. He is managing director of SURAGUS since 2010.

The German SURAGUS GmbH offers non-contact measuring and testing solutions based on eddy current testing technology for several industries and materials such as graphene, coated glass, printed electronics and carbon fiber.

The SURAGUS EddyCus series measures sheet resistance, metal layer thickness, optical density, emissivity and permittivity. These systems enable in- and offline quality control after deposition, annealing, tempering and oxidation processes. Our customers value the multiplicity of applications, the high accuracy, user-friendly software and our fast service.